Title:
欠陥修正方法
Document Type and Number:
Japanese Patent JP5051643
Kind Code:
B2
Inventors:
Takashi Koike
Shigeo Shimizu
Shigeo Shimizu
Application Number:
JP2007258566A
Publication Date:
October 17, 2012
Filing Date:
October 02, 2007
Export Citation:
Assignee:
ntn corporation
International Classes:
G09F9/00; G02F1/13; G02F1/1368; H01L21/336; H01L29/786
Domestic Patent References:
| JP2007220894A | ||||
| JP2005317802A | ||||
| JP11108848A | ||||
| JP2983879B2 | ||||
| JP8292442A | ||||
| JP2003098336A | ||||
| JP2005095971A | ||||
| JP2003215640A | ||||
| JP8203898A | ||||
| JP2005300940A | ||||
| JP2006276188A | ||||
| JP2007165013A | ||||
| JP2007066800A | ||||
| JP4142702A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa