Title:
不良検出装置及び不良検出方法
Document Type and Number:
Japanese Patent JP7423368
Kind Code:
B2
Abstract:
To provide a method capable of improving the detection accuracy of the defective product of a substrate by an image.SOLUTION: A defect detection device for the substrate by the image includes an imaging apparatus 20, a plurality of classification parts 50 for classifying the attribute of the image by a learnt classifier 54, and an image analysis part 70 for analyzing the image belonging to a particular classification among the images classified by the classification parts 50. The classifier 54 is made to learn by a teaching storage part 61 and a learning part 62.SELECTED DRAWING: Figure 3
Inventors:
Satoshi Koyama
Shinsuke Kawai
Kazushige Ohno
Shinsuke Kawai
Kazushige Ohno
Application Number:
JP2020050478A
Publication Date:
January 29, 2024
Filing Date:
March 23, 2020
Export Citation:
Assignee:
IBIDEN Co., Ltd.
International Classes:
G01N21/956
Domestic Patent References:
| JP2020041889A | ||||
| JP2007327937A | ||||
| JP6653929B1 | ||||
| JP2019159889A | ||||
| JP2018005639A | ||||
| JP2011192032A | ||||
| JP2017211259A |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda
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