Title:
形状特徴に基づく欠陥検出の方法及び装置
Document Type and Number:
Japanese Patent JP4601134
Kind Code:
B2
Abstract:
A two-dimensional scatter diagram is generated by plotting grey grades of pixels from a test image in contrast to grey grades of corresponding pixels from a reference image. A noise suppression filter is applied to the scatter diagram in order to define a mask form that can be deduced and completed to form a mask. Defect pixels are identified in the test image and corresponding pixel grey values are compared with the mask.
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Inventors:
Hamid Kay. Agajan
Application Number:
JP2000234951A
Publication Date:
December 22, 2010
Filing Date:
August 02, 2000
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
G01B11/24; G01N21/956; G01B15/00; G01B15/08; G01N21/95; G01N23/225; G01Q30/04; G06T1/00; G06T7/00; H01L21/66
Domestic Patent References:
| JP11304718A | ||||
| JP2000208575A | ||||
| JP2004515830A |
Other References:
Hiroshi Hanaizumi et al, An Automatic Registration Method For Remotely Sensed Multi Spectral Images By Using Spatial Correlation Between Local Triangles,PROCEEDINGS OF THE INTERNATIONAL GEOSCIENCE AND REMOTE SENSING SYMPOSIUM,1989年 7月10日,Vol.3,pp.1287-1290
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yuichi Yamada
Ikeda adult
Toshiaki Matsuzawa
Yuichi Yamada
Ikeda adult
Toshiaki Matsuzawa