Title:
DEFECT DETECTION SYSTEM
Document Type and Number:
Japanese Patent JPS5288085
Kind Code:
A
Abstract:
PURPOSE: Defects of a transparent film or an object coated with a transparent film is detected by radiating the same part of the object with more than two coherent lights (laser lights or lights of mercury lamps) of varying wavelengths or incident angles.
Inventors:
BAN MINOKICHI
Application Number:
JP419676A
Publication Date:
July 22, 1977
Filing Date:
January 17, 1976
Export Citation:
Assignee:
CANON KK
International Classes:
G01B11/00; G01N21/89; G01N21/896; G01N21/94; G01N21/958; (IPC1-7): G01N21/00; G01N21/32