Title:
欠陥検出装置
Document Type and Number:
Japanese Patent JP6958737
Kind Code:
B2
Abstract:
A defect detection device 10 includes: an excitation source 11 capable of being placed at any position on a surface of an inspection target object S, the excitation source 11 being configured to excite an elastic wave within the inspection target object S, the elastic wave being predominant in one vibration mode and propagating in a predetermined direction; an illumination unit (pulsed laser light source 13, illumination light lens 14) configured to perform stroboscopic illumination on an illumination area of the surface of the inspection target object by using a laser light source; a displacement measurement unit (speckle shearing interferometer 15) configured to collectively measure a displacement of each point in a front-back direction within the illumination area in at least three different phases of the elastic wave, by speckle interferometry or speckle shearing interferometry; and a reflected wave/scattered wave detector 16 configured to detect either one or both of a reflected wave and a scattered wave of the elastic wave, based on the displacement measured by the displacement measurement unit.
Inventors:
Takahide Hatakebori
Yuya Nagata
Kenji Takubo
Yuya Nagata
Kenji Takubo
Application Number:
JP2020528709A
Publication Date:
November 02, 2021
Filing Date:
May 21, 2019
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
G01N29/24; G01B11/30; G01J9/02; G01N21/88
Domestic Patent References:
| JP2017219318A | ||||
| JP2002529691A | ||||
| JP8184581A | ||||
| JP200065802A | ||||
| JP2001124740A | ||||
| JP2004101189A | ||||
| JP2005517177A | ||||
| JP20192714A |
Foreign References:
| WO2017221324A1 | ||||
| US6081481 | ||||
| US5146289 |
Attorney, Agent or Firm:
Kyoto International Patent Office
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