PURPOSE: To enable the effective detecting of foreign matters and defects with high resolving power and no inspector's individual difference by doing operations for image concentration in respect to the similar points inside plural sheets of images obtained from a plurality of detectors.
CONSTITUTION: A plurality of detectors 208 to 211 for secondary electrons or the like are installed in a scanning electronic microscope. Image signals obtained from the respective detectors are computed to determine the quantity characteristic of features of the points just like inclination of the plane, on the respective points on a sample. The computed value are compared with the predetermined quantity characteristic of features in a normal sample whether it surpasses the limit or not. Images obtained from these plural detectors can be used to determine the quantity characteristic of the features of a surface of the sample, which are not obtained by the use of one detector, so that defective parts can be extracted with high precision.
HONMA KOICHI
FURUMURA FUMINOBU
FURUYA HISAHIRO
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