Title:
欠陥検査装置、欠陥検査プログラム、図形描画装置および図形描画システム
Document Type and Number:
Japanese Patent JP5015721
Kind Code:
B2
Inventors:
Ryo Yamada
Toru Furukawa
Kiyoshi Kitamura
Kazuhiro Nakai
Toru Furukawa
Kiyoshi Kitamura
Kazuhiro Nakai
Application Number:
JP2007276775A
Publication Date:
August 29, 2012
Filing Date:
October 24, 2007
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
| JP2004094044A | ||||
| JP2001344302A | ||||
| JP2000250960A | ||||
| JP2007059429A | ||||
| JP2003099770A | ||||
| JP2003099771A | ||||
| JP10171093A | ||||
| JP10083452A | ||||
| JP60097482A | ||||
| JP2000155408A | ||||
| JP7219202A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita