Title:
カラーフィルタ基板の欠陥検査装置および欠陥検査方法
Document Type and Number:
Japanese Patent JP5446232
Kind Code:
B2
Inventors:
Cui Hailong
Junichi Saito
Junichi Saito
Application Number:
JP2008311949A
Publication Date:
March 19, 2014
Filing Date:
December 08, 2008
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
G02B5/30; G01M11/00; G01N21/88; G02B5/20
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| JP2007212442A | ||||
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