Title:
欠陥検査方法および欠陥検査装置
Document Type and Number:
Japanese Patent JP3986049
Kind Code:
B2
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Inventors:
Ippei Torigoe
Application Number:
JP2002005473A
Publication Date:
October 03, 2007
Filing Date:
January 15, 2002
Export Citation:
Assignee:
Kumamoto Techno Industrial Foundation
International Classes:
G01N29/04; G01N29/22; G01N29/44
Domestic Patent References:
JP8313495A | ||||
JP7054245B2 | ||||
JP2001305112A |