Title:
欠陥観察方法
Document Type and Number:
Japanese Patent JP4136883
Kind Code:
B2
Abstract:
This invention provides a technique for observing defects, which can automatically decide a direction from inclined observation and take an inclined review image. In a defect observing system for detecting the defects and thereafter observing images of the defects from various directions in detail, positions of inclined images to be taken are automatically displayed on a display screen from a planar image (top-down image) of a SEM using CAD data, and the defects are selected from the images displayed on the display screen based on specification by a user, an inclined angle and direction are determined per selected image to take an inclined image (beam-tilt image), and the inclined image of each defect is acquired.
Inventors:
Honda Toshifumi
Kubo Toshiro
Kubo Toshiro
Application Number:
JP2003345447A
Publication Date:
August 20, 2008
Filing Date:
October 03, 2003
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01N23/225; G06T1/00; G21K7/00; H01J37/20; H01L21/66
Domestic Patent References:
| JP2002310962A | ||||
| JP2003229462A | ||||
| JP2003031631A | ||||
| JP2003218181A | ||||
| JP2002131252A | ||||
| JP2000243338A |
Attorney, Agent or Firm:
Yamato Tsutsui