To align time differences of outputs of deflection voltages in respective electrodes of an 8-pole electrostatic deflection means, and to carry out deflection of electron beams in high accuracy, in an electron beam scanning device equipped with an 8-pole electrostatic deflection means deflecting electron beams.

Deflection data with deflection data (Vx, Vy) of X- and Y-directions multiplied by any factors (±α, ±β) are stored in a memory device 101. Correction data are stored in a memory device 102, and correction data are calculated on the deflection data when deflection operation is not yet carried out. Each deflection data is converted into an analog value by a DA conversion circuit 103. The deflection data converted into the analog value is calculated, amplified, and outputted into a deflection voltage given to each electrode of the 8-pole electrostatic deflector 110 by an analog calculation amplification circuit 104.

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