PURPOSE: To reduce the cost by providing means for producing plural metal ion beams, a deflection means having an annular solenoid and a driving means for rotating an object to be irradiated around the center of the annular solenoid.

CONSTITUTION: Upon radiation of argon ion beams projected from four argon guns 1AW1D onto an electrode 2, four copper ion beams 31W34 are projected from the electrode 2 toward respective gaps 25W28 of the annular solenoid at a deflection control section 20. Said copper ion beams 31W34 are deflected in the radial direction of the annular solenoid 22 by the magnetic fields produced through the respective coils L1WL4 connected together in series, while moved in the circumferential direction by means of a motor 14. Consequently, four meshed wirings can be formed simultaneously on a printed board 8 by means of only one deflecting means, resulting in cost reduction.