PURPOSE: To enable a sample shape measurement error or a position error due to a relative positional deviation between a pressing robot and a shape measuring robot to be compensated for in a simple configuration for a deformation testing robot which measures a sample shape with the shape measuring robot by deforming the sample with the pressing robot.

CONSTITUTION: A pad member 4 is installed at a traveling stage 2c of a shape- measuring robot 2. A control means 5 allows a traveling stage 1c of a pressing robot 1 to be moved. a pressing portion 1a to be pressed against the pad member 4, and further the pressing portion 1a to be moved to a specific position of the pad member 4 based on a pressing force detection value according to a force-sensing sensor 1b. After this move, a position of the pressing portion which is detected by a position detection means 1d is read. An amount of compensation of a sample shape measurement error or a pressing position error due to a relative positional deviation between the pressing robot 1 and the shape-measuring robot 2 is calculated according to a relationship between the position of the pad member 4 and the position of the read pressing portion.