Title:
DEGASSING DEVICE
Document Type and Number:
Japanese Patent JP2017225914
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a degassing device having a high-degassing process efficiency, capable of shortening a length of a degassing unit, having low-pressure loss and capable of reduction in the size thereof.SOLUTION: A degassing device 100 disposed inside a decompression chamber 120 includes a degassing unit 110 constituted of a plurality of thermofusion fluororesin tubes 111, where the thermofusion fluororesin tube 111 has an inner diameter of 0.5 mm or less. The degassing device 100 satisfies a relation of (inner diameter of fluororesin tube 111×number of effective tubes)/(tube bundle outer diameter)≥6 as a coefficient of processing capacity.SELECTED DRAWING: Figure 1
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Inventors:
SATO RYOSUKE
Application Number:
JP2016122185A
Publication Date:
December 28, 2017
Filing Date:
June 20, 2016
Export Citation:
Assignee:
JUNKOSHA INC
International Classes:
B01D61/00; B01D19/00; B01D63/06; B01D71/32; B01D71/36
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