To provide a delivery controller used for supplying fluid such as a chemical to a semiconductor wafer or for dripping a fixed amount of the chemical in the medical field.
A body 1 is provided with an almost conical shape liquid chamber 6 in the center of an upper surface, and a first flow passage 4 and a second flow passage 5 communicated with the liquid chamber 6. A bottom surface of the liquid chamber 6 is flat, and the lowermost position of an inside diameter of the first flow passage 4 and the second flow passage 5 is almost flush with the bottom surface of the liquid chamber 6. A hood 2 of the upper surface of the body 1 has an almost conical shape air chamber 7 which is communicated with the outside through a vent hole 8 in a size of 0.3 mm. A diaphragm 3 comprises a center part plane and thicker than other parts, a thin film part extended to a radial outer side, and an annular outer peripheral part, and the outer peripheral part is held and fixed by the body 1 and the hood 2.
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Jun Tsuruta
Tetsuro Shimada
Shinozaki Masami
Tanimitsu Masaharu
Yasushi Ohashi