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Title:
DEPOSIT-REMOVING DEVICE AND FILM-FORMING APPARATUS
Document Type and Number:
Japanese Patent JP2004166970
Kind Code:
A
Abstract:

To provide a deposit-removing device and a film-forming apparatus, which prevent sticking of crud to a view port of the film-forming apparatus exposed to a high temperature environment, and remove the deposit stuck to a plate material such as the view port appropriately and securely under every temperature environment to improve the reliability on removal work and the accuracy in a film-forming process.

The deposit-removing device 20 removes the crud by attractive force across the plate material. As a removal means of the deposit-removing device 20, an aluminum mesh material for taking in and retaining the stuck crud is employed. The deposit-removing device 20 which is composed of a removal structure 21 having the mesh material and an operation structure 22 attracting the removal structure, is set to the view port 17 of the film-forming apparatus. The view port is turnably provided with a shielding door on the side of a film-forming chamber to prevent the sticking of the deposit thereto as much as possible.


Inventors:
OTSUBO EIICHIRO
SASAGAWA EISHIRO
UENO MOICHI
Application Number:
JP2002000336414
Publication Date:
June 17, 2004
Filing Date:
November 20, 2002
Export Citation:
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Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
H05H1/46; A47L1/03; B01J19/08; B08B1/00; C23C16/44; H01L21/205; H01L21/3065; (IPC1-7): A47L1/03; B01J19/08; B08B1/00; C23C16/44; H01L21/205; H01L21/3065; H05H1/46
Attorney, Agent or Firm:
藤田 考晴
田中 重光