To provide a deposit-removing device and a film-forming apparatus, which prevent sticking of crud to a view port of the film-forming apparatus exposed to a high temperature environment, and remove the deposit stuck to a plate material such as the view port appropriately and securely under every temperature environment to improve the reliability on removal work and the accuracy in a film-forming process.
The deposit-removing device 20 removes the crud by attractive force across the plate material. As a removal means of the deposit-removing device 20, an aluminum mesh material for taking in and retaining the stuck crud is employed. The deposit-removing device 20 which is composed of a removal structure 21 having the mesh material and an operation structure 22 attracting the removal structure, is set to the view port 17 of the film-forming apparatus. The view port is turnably provided with a shielding door on the side of a film-forming chamber to prevent the sticking of the deposit thereto as much as possible.
SASAGAWA EISHIRO
UENO MOICHI
Shigemitsu Tanaka
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