To solve such a problem that when co-deposition is performed heretofore, since heaters surrounding containers for storing deposition materials are inclined, the space between the containers is increased and it becomes difficult to uniformly mix the deposition materials, so that the co-deposition is performed while reducing the space between the containers and uniformly mixing the deposition materials.
The openings of the containers are adjusted so that the evaporation centers of the deposition materials may hit one point of a material to be deposited. In the co-deposition shown in Fig.(D), both an opening 810a and an opening 810b are opposed. Alternatively, in the co-deposition shown in Fig.(E), the evaporation is performed using one upper part having an opening 810c for perpendicularly evaporating a deposition material and the other upper part having an opening 810d inclined in the direction of the one upper part.
SAKATA JUNICHIRO
KUWABARA HIDEAKI
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