Title:
【発明の名称】露光装置及び露光方法
Document Type and Number:
Japanese Patent JP3336508
Kind Code:
B2
Inventors:
Muneyasu Yokota
Seiji Fujitsuka
Yoshihiro Shiraishi
Seiji Fujitsuka
Yoshihiro Shiraishi
Application Number:
JP10623093A
Publication Date:
October 21, 2002
Filing Date:
April 08, 1993
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP2166717A | ||||
| JP2275616A | ||||
| JP62198863A |
Attorney, Agent or Firm:
Masatake Shiga (5 outside)