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Patent Searching and Data


Title:
MEASURING METHOD FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH0618616
Kind Code:
A
Abstract:

PURPOSE: To obtain the measuring method for a semiconductor device, which can make electrical connection excellent and can maintain continuous stability, in the inspection of electric characteristics.

CONSTITUTION: High-pressure air is blown on a measuring head 1, which inspects the electric characteristics of a semiconductor device 2, with a high- pressure air gun 3. Thus, the semiconductor device 2 and the peripheral part of the measuring head 1 for inspecting the electric characteristics are cleaned. The semiconductor device 2 is sucked with a semiconductor-device setting jig 4 and placed on the measuring head 1 for inspecting the electric characteristics. The semiconductor device 2 is pushed with the semiconductor-device setting jig 4. The semiconductor-device setting jig 4 is vibrated. Thus, the surfaces of a contact pin 5 and a lead pin 6 of the semiconductor device are polished so as to obtain the excellent electric contact. Since the surfaces of the contact pin 5 and the lead pin 6 are polished and dust is generated around the measuring set, the high-pressure air is blown with the high-pressure air gun 3.


Inventors:
HAYASHI HARUYASU
Application Number:
JP17805492A
Publication Date:
January 28, 1994
Filing Date:
July 06, 1992
Export Citation:
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Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
H01L21/66; G01R31/26; (IPC1-7): G01R31/26; H01L21/66
Attorney, Agent or Firm:
Akira Kobiji (2 outside)