Title:
【発明の名称】微小寸法測定方式
Document Type and Number:
Japanese Patent JP2695797
Kind Code:
B2
Inventors:
Kato Makoto
Yokoyama Tetsuo
Juntaro Arima
Toshihiro Furuya
Yokoyama Tetsuo
Juntaro Arima
Toshihiro Furuya
Application Number:
JP25362487A
Publication Date:
January 14, 1998
Filing Date:
October 09, 1987
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/22; C01G15/00; G01B15/00; H01J37/244; H01L21/027; H01L21/30; (IPC1-7): C01G15/00
Domestic Patent References:
| JP6199809A | ||||
| JP60161514A | ||||
| JP58117405A | ||||
| JP58117404A | ||||
| JP5796207A |
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)