Title:
【発明の名称】位置決め制御装置および位置決め制御方法
Document Type and Number:
Japanese Patent JP2861277
Kind Code:
B2
Abstract:
A positioning control apparatus comprises a feedback compensatory system and a feedforward compensatory system. The feedforward compensatory system comprises a detector for detecting a position of a controlled object whose position is to be controlled, and a compensator connected to the detector. The feedforward compensatory system comprises a first filter having a characteristics reverse to that of the feedback compensatory system, and a second filter having a characteristics reverse to that of the object. A desired drive signal generator supplies the feedforward compensatory system with a desired drive signal having a frequency spectrum having a minimum at the mechanical resonance frequency of the object.
Inventors:
UEDA TAKAMI
MIZUNO SHIGEMOTO
YAMAMOTO SATORU
MIZUNO SHIGEMOTO
YAMAMOTO SATORU
Application Number:
JP14699890A
Publication Date:
February 24, 1999
Filing Date:
June 04, 1990
Export Citation:
Assignee:
MITSUBISHI DENKI KK
International Classes:
G05D3/12; G11B5/55; G05B11/32; (IPC1-7): G05D3/12; G05B11/32
Domestic Patent References:
| JP256008A | ||||
| JP62212801A |
Attorney, Agent or Firm:
Kaneo Miyata (2 outside)