Title:
【発明の名称】結晶基板をアライメントするための方法および装置
Document Type and Number:
Japanese Patent JP2003532866
Kind Code:
A
Abstract:
The invention provides an apparatus ( 10, 300 ) incorporating a lithographic tool ( 20 ) for printing a pattern from a mask ( 35 ) onto a substrate, for example a wafer ( 190 ), together with a substrate angle measuring tool ( 100, 310 ) employing X-ray diffraction techniques for determining substrate crystallographic orientation. The apparatus ( 10, 310 ) is calibrated so that the mask ( 35 ) is correctly angularly orientated with respect to the measuring tool ( 100, 310 ). When a new substrate ( 190 ) is loaded into the apparatus ( 10, 310 ) for having the pattern from the mask ( 35 ) printed thereonto, the apparatus ( 10, 300 ) angularly aligns the substrate ( 190 ) relative to the measuring tool ( 100, 310 ), thereby also aligning it angularly to the mask ( 35 ). The apparatus ( 10, 300 ) does not utilise any flats on the substrate for angular alignment purposes; as a consequence, the apparatus ( 10, 300 ) is capable of providing a high degree of accuracy when aligning crystal planes of the substrate ( 190 ) to features on the mask ( 35 ), the degree of accuracy approaching one minute of arc or better.
Inventors:
Richard Beanland
Derrick Gordon Heart
Derrick Gordon Heart
Application Number:
JP2001542280A
Publication Date:
November 05, 2003
Filing Date:
November 07, 2000
Export Citation:
Assignee:
Bookham Technology PLC
International Classes:
G01B15/00; G01N23/20; G03F9/00; H01L21/027; (IPC1-7): G01B15/00; G03F9/00; H01L21/027
Attorney, Agent or Firm:
Masatake Shiga (7 outside)