Title:
【発明の名称】マイクロメカニカル・デバイスからの電気テスト信号を増幅する方法及び装置
Document Type and Number:
Japanese Patent JP2002538973
Kind Code:
A
Abstract:
An apparatus and method is provided for testing performance characteristics of a MEMs device. The apparatus includes a test probe that is electrically connected to a mechanical member of the MEMs device for receiving electrical data signals from the MEMs device that are indicative of the movement of the mechanical member due to external excitation . The apparatus also includes communications or transmitting the signals from the test probe and an analyzer for receiving the signals and for analyzing the signals to determine the performance characteristics of the MEMs device. The apparatus a so includes an amplifier connected between the test probe and the communications. The amplifier is placed in close proximity to the test probe such at it amplifies the signals prior to transmission of the signals by the communications. As such, the electrical data signals are amplified before sufficient noise is introduced into the signals to reduce their signal to noise ratio to less than a predetermined level. By amplifying the signals prior to the introduction of significant noise, the signals, which may have relatively small amplitude, are not obscured by the noise.
Inventors:
Bryan, Elizabeth Earl
Dead Weiler, Marden Kay
Green, david n
Hetats, James El
Murphy, Hugh Jay
Dead Weiler, Marden Kay
Green, david n
Hetats, James El
Murphy, Hugh Jay
Application Number:
JP2000603973A
Publication Date:
November 19, 2002
Filing Date:
February 04, 2000
Export Citation:
Assignee:
Honeywell Incorporated
International Classes:
B81C99/00; G01R1/073; (IPC1-7): B81C5/00
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)