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Title:
【発明の名称】高純度シリコン単結晶の製造方法および高純度シリコン単結晶
Document Type and Number:
Japanese Patent JP2961340
Kind Code:
B2
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Inventors:
HASHIMOTO MASANORI
IMAYOSHI MASASHI
MERA HOYO
Application Number:
JP19344792A
Publication Date:
October 12, 1999
Filing Date:
June 26, 1992
Export Citation:
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Assignee:
KOMATSU DENSHI KINZOKU KK
International Classes:
C30B15/10; C30B29/06; H01L21/208; (IPC1-7): C30B15/10; C30B29/06
Domestic Patent References:
JP489388A



 
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