PURPOSE: To provide the titled paint capable of forming a destaticizing film which is transparent and is difficultly peeled when applied to equipment members requiring antistatic properties, by dispersing fine transparent metal oxide particles having sharp protrusions in an org. high-molecular binder.
CONSTITUTION: At least 65wt% fine transparent metal oxide particles (e.g. fine tin oxide particles) having sharp protrusions and low electrical resistance are incorporated in an org. high-molecular binder to obtain a destaticizing paint. When a transparent member 1 such as a cover for semiconductor manufacturing equipment is coated with said paint to form a film, part of the fine transparent metal oxide particle 2 is protruded from the surface of the org. high-molecular binder 3 and static charge is eliminated by discharge phenomenon at the tops of the protrusions. When the thickness of the film is 10μ or below, the light transmissibility of the transparent member 1 such as cover is not reduced.
KAWAI HIDENAO
NAGATANI YOSHITERU
HITACHI LTD
| JPS4844316A | 1973-06-26 | |||
| JPS5224232A | 1977-02-23 | |||
| JPS5785866A | 1982-05-28 |