Title:
【発明の名称】微細パターン製造装置及び微細パターンの製造方法
Document Type and Number:
Japanese Patent JP2936227
Kind Code:
B2
Inventors:
SAKUHARA TOSHIHIKO
Application Number:
JP14778188A
Publication Date:
August 23, 1999
Filing Date:
June 15, 1988
Export Citation:
Assignee:
SEIKOO INSUTSURUMENTSU KK
International Classes:
C25D1/04; C25D5/04; C25D7/00; C25D11/00; C25D17/12; C25F3/14; G01Q60/10; G01Q60/16; G01Q60/60; G01Q80/00; (IPC1-7): C25D5/04; C25D7/00; C25D11/00; C25D17/12; C25F3/14
Domestic Patent References:
| JP59129780A | ||||
| JP6151640B2 |
Attorney, Agent or Firm:
Keinosuke Hayashi