Title:
DETECTING MECHANISM OF WAFER CASSETTE
Document Type and Number:
Japanese Patent JPH07335726
Kind Code:
A
Abstract:
PURPOSE: To detect a wafer cassette correctly and positively without being subject to the effects of disturbance light and the micro-vibrations of an elastic plate, to simplify the shape of the elastic plate and to facilitate adjustment for detecting the wafer cassette.
CONSTITUTION: The base end section 6A of an elastic plate 6, in which a button 10 projected from a plate surface is mounted at a free end section, is fixed onto a magazine plate 9 for a cassette stage or a cassette shelf, on which a wafer cassette 4 is placed, and a micoswitch 5 operated by the button 10 is installed onto the elastic plate 6.
Inventors:
OBA SHIGEO
SHINO KAZUHIRO
KAMIYA KENICHI
SHINO KAZUHIRO
KAMIYA KENICHI
Application Number:
JP13048494A
Publication Date:
December 22, 1995
Filing Date:
June 13, 1994
Export Citation:
Assignee:
KOKUSAI ELECTRIC CO LTD
International Classes:
H01L21/68; H01L21/22; H01L21/683; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Ishido