Title:
DETECTION CONVERTER AND PRESSURE DETECTING METHOD WHEREIN OUTPUT SIGNAL VOLTAGE IS INCREASED USING SCHOTTKY JUNCTION
Document Type and Number:
Japanese Patent JPH0864842
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a pressure transducer, and its manufacturing method, which is manufactured at a cost lower than that of the conventional system, while no amplification of output signal is required before signal processing. SOLUTION: A sensing transducer 10 and its manufacturing method, uses a Schottky junction 12 having a conductive layer 16 disposed on a semiconductor substrate 14 is used. The conductive layer 16 is formed by a reaction between a normal metal and a part of the semiconductor substrate 14. One example of the conductive layer 16 is a metal silicide layer. In one pressure sensing method, substantially a constant reverse current is applied to the Schottky junction 12. Since the change in reverse output voltage of the junction 12 is proportional to the pressure change applied on the junction 12 itself, it can also be used to sense pressure. Since the output voltage change is significantly higher than that obtained with prior pressure transducer, the output signal of the transducer 10 can be used without substantial additional amplification or other conditioning.
Inventors:
DORAGIYAN EI MURADENOBITSUKU
MAAETSUSHI SHIYAA
MAAETSUSHI SHIYAA
Application Number:
JP21128695A
Publication Date:
March 08, 1996
Filing Date:
July 28, 1995
Export Citation:
Assignee:
MOTOROLA INC
International Classes:
G01L1/18; G01L1/00; G01L9/00; H01L29/47; H01L29/84; H01L29/872; (IPC1-7): H01L29/84; G01L1/18; H01L29/872
Attorney, Agent or Firm:
Masanori Honjo (1 person outside)
Next Patent: FABRICATION OF ZENER DIODE