Title:
検出装置、検出システム、検出方法、及び検出プログラム
Document Type and Number:
Japanese Patent JP6794638
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a detection device that can obtain the distance to each point on an object.SOLUTION: A detection device (1) includes: an optical system (2); a detection element (3) that detects an object (OB) through the optical system; a control unit (21) that changes a focusing position of the optical system from a first focusing position (Z1) to a second focusing position (Z2) and executes first detection to detect the object with a first diaphragm value and second detection to detect the object with a second diaphragm value in the second focusing position state; and a distance calculation unit (22) that calculates the depth information of the object using the result of the first detection and the result of the second detection.SELECTED DRAWING: Figure 1
Inventors:
Nakagawa Genyo
Takeaki Sugimura
Takeaki Sugimura
Application Number:
JP2016046342A
Publication Date:
December 02, 2020
Filing Date:
March 09, 2016
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01C3/06; G01B11/00; G01B11/24; G02B7/28; G02B7/36; G03B7/095; G03B13/30; G03B13/36; G03B15/00; H04N5/225; H04N5/232
Domestic Patent References:
| JP5332725A | ||||
| JP2007139892A | ||||
| JP2014220583A |
Attorney, Agent or Firm:
Kazuya Nishi
Takeshi Kawamura
Takeshi Kawamura