Title:
検出装置、インプリント装置、平坦化装置、検出方法及び物品製造方法
Document Type and Number:
Japanese Patent JP7182904
Kind Code:
B2
Abstract:
A detection device includes an illumination optical system and a detection optical system. The illumination optical system is configured to illuminate a first diffraction grating having a first period in a first direction and a second diffraction grating having a second period different from the first period. The detection optical system is configured to detect light diffracted by the first and second diffraction gratings. The illumination optical system includes an optical member configured to form, on a pupil plane, a first pole and a second pole opposite to the first pole. The illumination optical system causes lights from the first and second poles to obliquely enter the first and second diffraction gratings from the first direction to illuminate the first and second diffraction gratings. The detection optical system detects diffracted light diffracted by one of the first and second diffraction gratings and by an other diffraction grating.
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Inventors:
Toshiki Iwai
Takamitsu Komaki
Yasuyuki Unno
Nozomi Hayashi
Takamitsu Komaki
Yasuyuki Unno
Nozomi Hayashi
Application Number:
JP2018104910A
Publication Date:
December 05, 2022
Filing Date:
May 31, 2018
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02; G01B11/25
Domestic Patent References:
| JP2013030757A | ||||
| JP2017010962A | ||||
| JP2013102139A | ||||
| JP2016027325A | ||||
| JP62172203A |
Foreign References:
| US20110266706 | ||||
| KR100740995B1 |
Attorney, Agent or Firm:
Takuma Abe
Sougo Kuroiwa
Sougo Kuroiwa
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