Title:
検出装置、処理装置、検出方法、及び処理プログラム
Document Type and Number:
Japanese Patent JP7234595
Kind Code:
B2
Abstract:
To reduce an influence which deformation of a second object attached to a first object has on information of the first object.SOLUTION: A detector comprises: a detection unit which detects an object including a first object and a second object attached to the first object; a calculation unit which calculates spacial frequency components of the object on the basis of a detection result of the detection unit; a deformation detection unit which detects deformation of the second object on the basis of a calculation result of the calculation unit; and a model generation unit which generates model information of the first object on the basis of the detection result of the detection unit and a detection result of the deformation detection unit.SELECTED DRAWING: Figure 1
Inventors:
Genhiro Nakagawa
Mikiya Tanaka
Mikiya Tanaka
Application Number:
JP2018216403A
Publication Date:
March 08, 2023
Filing Date:
November 19, 2018
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G06T1/00; G06T7/50
Domestic Patent References:
| JP11312228A |
Foreign References:
| WO2012161291A1 |
Attorney, Agent or Firm:
Kazuya Nishi