Title:
検出装置
Document Type and Number:
Japanese Patent JP5885350
Kind Code:
B2
Abstract:
[Problem] To provide a small-sized, stable, and highly sensitive detection device by achieving an optical system which is the most suitable for an optical waveguide mode sensor using a spectral measurement method. [Solution] A detection device including: a detection plate in which a silicon layer and a silicon oxide layer are arranged in this order on a silica glass substrate; an optical prism which is optically adhered to a surface of the silica glass substrate of the detection plate, where the surface is not provided with the silicon layer and the silicon oxide layer; a light-irradiation unit configured to irradiate light to the detection plate through the optical prism and arranged so that light is incident on the optical prism with a fixed incident angle; and a light-detection unit configured to detect intensity of reflected light reflected from the detection plate, wherein the detection device detects a change in dielectric constant in the proximity of the surface of the silicon oxide layer of the detection plate by detecting a change in property of the reflected light, and wherein in the optical prism, an angle between an incident surface on which light irradiated from the light-irradiation unit is incident and an adhesion surface which adheres to the detection plate is 43° or less.
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Inventors:
Makoto Fujimaki
Masatsugu Akiyama
Kazutoshi Nagata
Masatsugu Akiyama
Kazutoshi Nagata
Application Number:
JP2012553566A
Publication Date:
March 15, 2016
Filing Date:
November 15, 2011
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
Shin-Etsu Chemical Co., Ltd.
Shin-Etsu Chemical Co., Ltd.
International Classes:
G01N21/41
Domestic Patent References:
| JP2007271596A | 2007-10-18 | |||
| JP2009085714A | 2009-04-23 | |||
| JP2006017648A | 2006-01-19 | |||
| JPWO2007029414A1 | 2009-03-12 |
Foreign References:
| WO2010130045A1 | 2010-11-18 | |||
| WO2010035232A1 | 2010-04-01 |
Other References:
JPN6014049614; Ｗｏｌｆｇａｎｇ Ｋｎｏｌｌ: 'ＩＮＴＥＲＦＡＣＥＳ ＡＮＤ ＴＨＩＮ ＦＩＬＭＳ ＡＳ ＳＥＥＮ ＢＹ ＢＯＵＮＤ ＥＬＥＣＴＲＯＭＡＧＮＥＴＩＣ ＷＡＶＥＳ' Ａｎｎｕ． Ｒｅｖ． Ｐｈｙｓ． Ｃｈｅｍ． Ｖｏｌ．４９, 1998, ５６９-５９０
Attorney, Agent or Firm:
Shin Shioda