検出センサ、振動子 - National Institute of Advanced Industrial Science and Technology

Title:

検出センサ、振動子

Document Type and Number:

Japanese Patent JP5083984

Kind Code:

B2

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Inventors:

Lou Jean
Maeda Ryutaro
Takashi Mihara

Application Number:

JP2008243669A

Publication Date:

November 28, 2012

Filing Date:

September 24, 2008

Export Citation:

Assignee:

National Institute of Advanced Industrial Science and Technology
Olympus Endo Technology America Inc.

International Classes:

G01N5/02; G01G3/16

Domestic Patent References:

Other References:

三原孝志ら,マイクロフィルムカンチレバー検出器と吸着管を用いた小型化学センサシステム,平成20年電気学会全国大会講演論文集,2008年 3月,p.238

Attorney, Agent or Firm:

Mitsuru Oba
Horikawa Miyuki

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