To provide a detection sensor that is enhanced in sensitivity, made small in size, reduced in cost and enhanced in precision, and to provide a vibrator.
The changes in vibration due to the substance bonded or adsorbed on a region which keeps the vibrational amplitude larger than fixed value is detected in a disk-shaped vibrator or a cantilever type vibrator, in order to detect matter of mass or mass with a high sensitivity in the detection sensor. The disk-shaped vibrator can be manufactured by using the so-called "Si single crystal" as a structural material by MEMS technique. It is preferable to form unevenness or grooves on the surface of the disk-shaped vibrator, in order to enhance the adhesion efficiency of the molecules or the like of an object of detection.
IKEHARA TAKESHI
MIHARA TAKASHI
OLYMPUS CORP
| JP2005098986A | 2005-04-14 | |||
| JP2001349816A | 2001-12-21 | |||
| JPH08228123A | 1996-09-03 | |||
| JP2004028956A | 2004-01-29 |
Horikawa Miyuki
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