Title:
検出センサ
Document Type and Number:
Japanese Patent JP5019120
Kind Code:
B2
Abstract:
An object of the present invention is to provide a detection sensor and a vibrator which can offer improved sensitivity. The present invention uses a scheme in which no piezoelectric layer, drive electrode, or the like is provided on the surface of a vibrator 30 and in which the vibrator 30 is driven by an actuator 40 provided separately from the vibrator 30. The actuator 40 is of a cantilever type and is provided near a fixed end 30a of the vibrator 30. Vibration of the actuator 40 is transmitted to the vibrator 30 via a coupling beam 70. Thus, vibration of the vibrator 30 is prevented from being inhibited by a piezoelectric layer, a drive electrode, or the like. This improves the Q value of the vibrator 30 and thus the sensitivity of the detection sensor 10. Furthermore, if the detection sensor 10 is configured to offer a sensitivity equivalent to that of a conventional one, the size of the detection sensor 10 can be sharply reduced compared to that of the conventional one.
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Inventors:
Jean roux
Takeshi Ikehara
Takashi Mihara
Takeshi Ikehara
Takashi Mihara
Application Number:
JP2007304936A
Publication Date:
September 05, 2012
Filing Date:
November 26, 2007
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
Olympus Endo Technology America Inc.
Olympus Endo Technology America Inc.
International Classes:
G01N5/02; G01G3/16
Domestic Patent References:
| JP3298897B2 | ||||
| JP2000180250A | ||||
| JP11113920A | ||||
| JP2004297951A | ||||
| JP2004286514A |
Attorney, Agent or Firm:
Mitsuru Oba
Horikawa Miyuki
Horikawa Miyuki