To detect relative positions between two objects with high accuracy.
A detector which detects relative positions of a first object and a second object in a first direction comprises an illumination system which illuminates a first mark disposed in the first object and a second mark disposed in the second object from an oblique side, and a detection optical system which detects interference light of diffraction light diffracted by the first mark and the second mark illuminated by the illumination optical system. In the illumination optical system, a light intensity distribution including at least one pole is formed on its pupil surface. The detection optical system includes a stop with which an aperture is provided on its pupil surface, and the aperture has a boundary including a line segment parallel to the first direction.
MISHIMA KAZUHIKO
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu