Title:
DETECTOR FOR PATTERN
Document Type and Number:
Japanese Patent JPS5851531
Kind Code:
A
Abstract:
PURPOSE:To accelerate detection by repeatedly deflecting the optical path of an imaging optical system at high speed by means of a high-speed revolving polyhedral mirror and scanning the image of an object in an imaging surface at high speed in the direction crossing at right angles with the direction of movement of the object through the movement of a table. CONSTITUTION:The optical path of the imaging optical system detecting the pattern of the object 2 to be inspected placed onto the movable table 1 is repeatedly deflected at high speed through a means such as the high-speed revolving polyhedral mirror 19, and the image of the object in the imaging surface is scanned at high speed in the direction approximately crossing at right angles with the direction of movement of the object through the movement of the table by the deflection. A plurality of photosensors 21 are arranged to the imaging surface in a row in the direction crossing at right angles with the direction of scan of the image, and signals are detected in parallel from respective photosensor 21 while being synchronized with the scan of the image. Accordingly, the pattern of a rectangular surface surrounded by the distance of the scan of the image and the length of the row of a plurality of the photosensors disposed in a row can be detected for once scan time.
Inventors:
AOKI NOBUHIKO
AKIYAMA NOBUYUKI
HARA YASUHIKO
FUSHIMI SATOSHI
OOSHIMA YOSHIMASA
AKIYAMA NOBUYUKI
HARA YASUHIKO
FUSHIMI SATOSHI
OOSHIMA YOSHIMASA
Application Number:
JP14939581A
Publication Date:
March 26, 1983
Filing Date:
September 24, 1981
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01N21/88; G01N21/956; H01L21/027; H01L21/66; H01L21/68; H01L21/00; (IPC1-7): H01L21/30
Attorney, Agent or Firm:
Toshiyuki Usuda