Title:
DETERGENT COMPOSITION FOR FLUOROCARBON FILM
Document Type and Number:
Japanese Patent JP2006128311
Kind Code:
A
Abstract:
To provide a detergent composition for a fluorocarbon film which excels in the removal performance of a minute contamination particle adhering to the fluorocarbon film formed on a substrate and detachability after dry etching without corroding a metal and changing the physical property of the fluorocarbon film, and to provide a manufacturing method of the semiconductor device using the detergent composition.
The detergent composition for the fluorocarbon film is provided such that it may contain an organic solvent of not less than 50 wt.% of a dielectric constant of 5-30 and may have a contact angle of 25° with respect to the fluorocarbon film formed on the substrate.
Inventors:
NAKAMURA MASAHIRO
YUASA HIROKO
YUASA HIROKO
Application Number:
JP2004312827A
Publication Date:
May 18, 2006
Filing Date:
October 27, 2004
Export Citation:
Assignee:
NIPPON ZEON CO
International Classes:
H01L21/304; B24B37/00; C11D3/20; C11D3/24; C11D3/43; C11D7/26; C11D7/28; C11D7/50
Foreign References:
| WO2000074128A1 | 2000-12-07 |