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Patent Searching and Data


Title:
DEVELOPMENT PROCESSING EQUIPMENT
Document Type and Number:
Japanese Patent JP2003098646
Kind Code:
A
Abstract:

To provide development processing equipment in which the capacity of a prescribed processing solvent in a processing solvent vessel can be increased more than ever before without making the entire equipment larger by effectively utilizing a dead space between the processing solvent vessel and a replenishment tank of the development processing equipment.

A plate-shaped subtank loadable in a gap between the processing solvent vessel and the replenishment tank mounted in a housing is formed, the subtank is provided in the gap, and also is communicated with the processing solvent vessel through a connecting pipe, and the connection pipe is provided with a circulation system for circulating a processing solvent between the subtank and the processing solvent vessel.


Inventors:
URA HIRONAGA
HIRAIWA HIROMI
Application Number:
JP2001293457A
Publication Date:
April 04, 2003
Filing Date:
September 26, 2001
Export Citation:
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Assignee:
NORITSU KOKI CO LTD
International Classes:
G03D3/06; (IPC1-7): G03D3/06
Attorney, Agent or Firm:
Katsunori Sugimoto (1 outside)