Title:
APPARATUS FOR TUNING DISCHARGE PERFORMANCE IN LASER CHAMBER
Document Type and Number:
Japanese Patent JP2023009091
Kind Code:
A
Abstract:
To provide laser-generated light sources such as those used in integrated circuit photolithographic manufacturing processes.SOLUTION: Disclosed is a laser discharge chamber in which the useful lifetime is extended by local electrical tuning using one or a combination of design of the chamber internal geometry, placement and distribution of components such as electrodes, current returns and capacitors within the chamber, and selective electrical isolation of portions of the components.SELECTED DRAWING: Figure 4A
Inventors:
Luo, Edward, Soo Chi
Uyazdowski, Richard, Carlo
Shu, Shuan
Uyazdowski, Richard, Carlo
Shu, Shuan
Application Number:
JP2022173043A
Publication Date:
January 19, 2023
Filing Date:
October 28, 2022
Export Citation:
Assignee:
Cymer Limited Liability Company
International Classes:
H01S3/0971; H01S3/038
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
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