To adjust an opening degree of a speed controller in order to adjust opening/closing speed of a needle valve and to keep action timing of the valve unchanged at the time of beginning and finishing of the adhesive application when a packing in a piston is exchanged in an adhesive applying device for a pellicle frame of an air-pressure operating system.
A cylinder main body 1 is vertically provided with a cylinder 21, a piston 23 to slide the cylinder 21 is provided at a rod 12 which is integrated with the needle valve 2 for opening/closing a discharge opening 4 of the cylinder main body 1 and a packing 24 is fitted to the periphery thereof. Air of definite pressure is continuously supplied to the cylinder 21 above the position, oil in a tank is supplied to the cylinder 21 below the piston by switching a solenoid valve and amount of the oil supplied is adjusted by the speed controller. Both pressures above and below the piston 23 are kept approximately equal in a state in which the discharge opening 4 is closed by the needle valve 2. When even a small quantity of the oil is supplied, the needle valve 2 is lifted to open the discharge opening 4.
FUJIMOTO MAKOTO
UEDA TOSHIHIRO
NAKAZAWA OOKI
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