To easily and safely remove dust in a chamber without scattering the dust to the outside of a pulling-up machine.

A single crystal pulling-up machine has a chamber 11a, a casing 11b connected to the upper end of the chamber 11a, a gas intake pipe 14 provided at the casing 11b and supplying an inert gas to the chamber 11a, a first suction pump 13 for sucking the inert gas through an inert gas discharge pipe 12 and a first stop valve 17 capable of opening/closing the discharge pipe 12. Further, the machine has a discharge pipe 18 for cleaning, whose one end is connected to the chamber 11a, a second suction pump 19 connected to other end of the discharge pipe 18 for cleaning and sucking the inert gas or atmosphere in the chamber 11a in such a state that the chamber 11a is opened to the atmosphere, and a second stop valve 20 provided at the discharge pipe 18 in the vicinity of the chamber 11a. It is possible to arrange an atmosphere intake pipe 24 having a filter 26 and a third stop valve 27 to the casing 11b.