Title:
DEVICE CONTAINING AMORPHOUS TEFLON
Document Type and Number:
Japanese Patent JPH07321291
Kind Code:
A
Abstract:
PURPOSE: To obtain an electronic device or a photoelectron device with TFE AF and its manufacturing method. CONSTITUTION: A TFE AF layer can be deposited on a substrate, a second material can be manufactured by combining a fluoro surface-active agent with a first material, the second material can be deposited on the TFE AF layer; furthermore, the second material can be subjected to patterning and etching, the second material can be removed, and a third material can be formed on the TFE AF layer. A ZFSNF surface-active agent can be combined with a photoresist, thus achieving patterning and etching. Also, the TFE AF layer can be heated. The second coating of the second material can also be added.
Inventors:
HAWAADO AARU BERATAN
CHI CHIEN CHIYOU
SUKOTSUTO AARU SAMAAFUERUTO
CHI CHIEN CHIYOU
SUKOTSUTO AARU SAMAAFUERUTO
Application Number:
JP30804994A
Publication Date:
December 08, 1995
Filing Date:
November 07, 1994
Export Citation:
Assignee:
TEXAS INSTRUMENTS INC
International Classes:
B05D1/40; B05D7/00; B32B27/30; C09D127/12; G03F7/004; G03F7/085; H01L21/312; H01L21/822; H01L27/04; (IPC1-7): H01L27/04; B05D7/00; H01L21/312; H01L21/822
Attorney, Agent or Firm:
Akira Asamura (3 outside)