Title:
DEVICE FOR CORRECTION OF DEFECT AND METHOD FOR CORRECTING DEFECT
Document Type and Number:
Japanese Patent JP2002131527
Kind Code:
A
Abstract:
To provide a device for correction of defects and a method for correcting defects to make high quality correction possible without giving damages on the corrected face.
After an air cylinder 15 is stroked to the lowest end, a Z-axis table 3 is driven at a low speed to a preliminarily determined distance to lower a scratch needle 19 to nearly touch an electrode pattern 22 or a glass substrate 21. While the air cylinder 15 is kept at the lowest end, the Z-axis table 3 is lifted, a slider 17 is brought into contact with a stopper 20, and an X-axis table and Y-axis table 2 are driven to operate the scratch needle 19 in the horizontal direction to remove a defect.
Inventors:
Saruta, Masahiro
Yamanaka, Akihiro
Yamanaka, Akihiro
Application Number:
JP2000000328828
Publication Date:
May 09, 2002
Filing Date:
October 27, 2000
Export Citation:
Assignee:
NTN CORP
International Classes:
G02B5/20; G02F1/13; G09F9/00; H01J9/20; H01J9/50; H01J11/02; H01J17/04; G02B5/20; G02F1/13; G09F9/00; H01J9/00; H01J9/20; H01J11/02; H01J17/04; (IPC1-7): G02B5/20; G02F1/13; G09F9/00; H01J9/50; H01J11/02; H01J17/04
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