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Title:
DEVICE FOR DETECTING VACUUM ULTRAVIOLET LIGHT
Document Type and Number:
Japanese Patent JPS6199822
Kind Code:
A
Abstract:

PURPOSE: To facilitate degassing within each channel of the titled device by exhausting gas molecules or the like stuck on a microchannel plate by actuating an exhauster and each part before using when the plate is exposed to gas.

CONSTITUTION: When detecting parts 4AW4D are adjusted outside a vacuum chamber, a vacuum pump 9 is actuated after these parts are arranged at the specified position of the vacuum. Then, when the degree of vacuum of the vacuum chamber attains to a specified value, the voltage lower than the ordi nary service voltage is impressed to the microchannel plates of the detecting parts 4AW4D. Then, a low pressure mercury lamp 8 is lighted and the microchannel plate of each detecting part is irradiated by light. As a result, the gas absorbed to the inside of the microchannel plate is disorbed fully.


Inventors:
SUGIE TATSUO
YAMASHITA TAKASHI
KANEKO SATORU
NAGATA HIROSHI
URAKAWA FUMIAKI
Application Number:
JP22147384A
Publication Date:
May 17, 1986
Filing Date:
October 22, 1984
Export Citation:
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Assignee:
JAPAN ATOMIC ENERGY RES INST
NIPPON KOGAKU KK
HAMAMATSU PHOTONICS KK
International Classes:
G01J1/02; G01T1/28; G02B6/00; H01J9/12; H01J40/00; H01J43/24; (IPC1-7): G01J1/02; G01T1/28; G02B6/00; H01J40/00
Attorney, Agent or Firm:
Kyozo Yuasa (4 outside)



 
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