Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DEVICE FOR DRYING SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE
Document Type and Number:
Japanese Patent JP2001255503
Kind Code:
A
Abstract:

To provide a device for drying a substrate for liquid crystal display device, capable of subjecting the substrate for liquid crystal display device to satisfactory drying treatment, while preventing generation of defects.

A pair of high-pressure gas jetting parts 12 and 13 for jetting high-pressure gas 30 to a substrate 1 for liquid crystal display device to blow treating liquid adhered to the substrate 1 away towards the upper stream side in a substrate-conveying direction are disposed opposite to each other at the upper and the lower positions of a substrate-conveying path 20 in a dry chamber 11, into which the substrate 1 treated with liquid is conveyed by a substrate- conveying mechanism 19. A pair of suction and exhausting parts 17 and 18 for suction and exhausting liquid drops, generated by blasting off the treating liquid by using the high-pressure gas 30 are disposed opposite to each other at the upper and the lower positions near to positions, to which the high-pressure gas 30 is blown against an upper stream side in the conveying direction of the high-pressure gas blast off parts 12 and 13 of the substrate-conveying path 20.


Inventors:
KOBAYASHI MASARU
KOYAMA EIJI
Application Number:
JP2000066674A
Publication Date:
September 21, 2001
Filing Date:
March 10, 2000
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G02F1/13; F26B5/00; F26B5/12; F26B15/18; (IPC1-7): G02F1/13; F26B5/00; F26B5/12; F26B15/18
Attorney, Agent or Firm:
Ishihara Masaru