To provide a device for drying a substrate for liquid crystal display device, capable of subjecting the substrate for liquid crystal display device to satisfactory drying treatment, while preventing generation of defects.
A pair of high-pressure gas jetting parts 12 and 13 for jetting high-pressure gas 30 to a substrate 1 for liquid crystal display device to blow treating liquid adhered to the substrate 1 away towards the upper stream side in a substrate-conveying direction are disposed opposite to each other at the upper and the lower positions of a substrate-conveying path 20 in a dry chamber 11, into which the substrate 1 treated with liquid is conveyed by a substrate- conveying mechanism 19. A pair of suction and exhausting parts 17 and 18 for suction and exhausting liquid drops, generated by blasting off the treating liquid by using the high-pressure gas 30 are disposed opposite to each other at the upper and the lower positions near to positions, to which the high-pressure gas 30 is blown against an upper stream side in the conveying direction of the high-pressure gas blast off parts 12 and 13 of the substrate-conveying path 20.
KOYAMA EIJI