Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
HEATING/DRYING DEVICE EQUIPPED WITH ROTARY HEATER BLOCK
Document Type and Number:
Japanese Patent JP2001274180
Kind Code:
A
Abstract:

To provide a small-sized heating/drying device which can be used suitably for in-line treatment for assembling semiconductor device.

This heating/drying device is provided with a heater block 3, which is formed in a prism-like shape and supported rotatably about its longitudinal center axis. A transfer arm puts works to be heated or dried in the grooves of the block 3 from transfer rails 17a, and at the same time, takes out heated or dried works from the block 3 and puts the works taken-out on the rails 17. The works put in the grooves of the block 3 are retained by means of a lid 10, which can be opened by means of tension spring hinges 11. A heater 5 incorporated in the block 3 heats and dries the works put in the grooves.


More Like This:
JP2006337017DRIER
Inventors:
KANEKO MASAYUKI
KAWAKAMI SHIGETOSHI
Application Number:
JP2000085548A
Publication Date:
October 05, 2001
Filing Date:
March 27, 2000
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NEC CORP
International Classes:
F26B11/04; H01L21/52; (IPC1-7): H01L21/52; F26B11/04
Attorney, Agent or Firm:
Izumi Katsufumi