To provide an evaporation device continuously usable for a long period of time while keeping constant the compositional ratio of an evaporated starting material to a carrier gas without deteriorating the purity of a starting liquid when the starting liquid of a porous glass base material is evaporated and supplied to an oxyhydrogen burner.
This evaporation device for evaporating the starting liquid of a porous glass base material is provided with a sealed tank 5 to which a starting liquid supply source, a carrier gas supply source 11 and a gas supply destination 21 are connected, a heating source 8 for heating the starting liquid 4 in the tank 5, a temperature sensor 9 for detecting the temperature of the liquid 4, a control circuit 10 for increasing/decreasing the energy supply amount to the source 8 according to the temperature detected by the sensor 9, a pressure gauge 16 for measuring the internal pressure of the tank 5, a flow rate control valve 14 disposed in the middle of the line from the source 11 to the tank 5 and a control circuit 15 for opening/closing the valve 14 according to the pressure measured by the gage 16.
SHIMADA TADAKATSU
KOIDE HIROYUKI
HIRASAWA HIDEO
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