DEVICE FOR GENERATING VAPOR FROM SOLID OR LIQUID STARTING MATERIAL FOR CVD OR PVD APPARATUS

Japanese Patent JP2016014187

A

PROBLEM TO BE SOLVED: To provide a method of improving a vaporizer for a CVD apparatus or a PVD apparatus in terms of its process technology.SOLUTION: There is provided a device for generating vapor, including: two thermal transfer bodies which are arranged successively in the direction of flow of a carrier gas, and have thermal transfer surfaces, each of which can be heated; and a feeding pipe 4 for feeding aerosol to one of the thermal transfer bodies for vaporization of the aerosol by bringing aerosol particles into contact with the thermal transfer surfaces. The vaporizer is designed in such a manner that: at least one of the thermal transfer bodies has an opening into which the feeding pipe 4 is inserted; the feeding pipe 4 has a first flow channel 23 for feeding the aerosol and a second flow channel 24 for feeding a carrier gas; gas passage openings 29, 30 are provided through which the carrier gas can flow from the second flow channel 24 into the first flow channel 23; and in this case, particularly, the second flow channel 24 is sealed in the area of an outlet 4' of the feeding pipe.

MICHAEL LONG
BIRGIT IRMGARD BECCARD
ANDREAS POQUE

JP2015129856A

January 28, 2016

June 29, 2015

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AIXTRON SE

C23C16/448; C23C14/00; H01L21/31

JPH07310185A	1995-11-28
JP2014523484A	2014-09-11

WO2007037268A1	2007-04-05
WO2012175124A1	2012-12-27

Takashiro Kojima
Noriko Kawai
Toshihiro Minami

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