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Title:
DEVICE INCLUDING PIEZOELECTRIC THIN FILM AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP2007318712
Kind Code:
A
Abstract:

To provide a device including a piezoelectric thin film capable of suppressing a spurious radiation by preventing the occurrence of unnecessary vibration in a lateral mode, and capable of avoiding degradation of reliability by stress concentration.

An acoustic resonator according to the present invention includes a substrate 105, a support section 104 provided on the substrate 105, a lower electrode 103 provided on the support section 104, a piezoelectric body 101 provided on the lower electrode 103, and an upper electrode 102 provided on the piezoelectric body 101. The lower electrode 103, the piezoelectric body 101 and the upper electrode 102 form a vibration section 107. The support section 104 for supporting the vibration section 107 is shaped such that at least one portion of a vertical cross-section thereof has a curvature.

COPYRIGHT: (C)2008,JPO&INPIT


Inventors:
NAKATSUKA HIROSHI
ONISHI KEIJI
YAMAKAWA TAKEHIKO
IWASAKI TOSHIHIRO
KAMIYAMA TOMOHIDE
Application Number:
JP2006277940A
Publication Date:
December 06, 2007
Filing Date:
October 11, 2006
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H03H9/05; B81B3/00; B81C3/00; H01H49/00; H01H57/00; H01H59/00; H01L41/09; H01L41/22; H01L41/313; H03H3/02; H03H9/17; H03H9/58; H03H9/70; H04B1/44
Attorney, Agent or Firm:
Shiro Ogasawara